Advanced Process Control (APC) and Real Time Dispatch (RTD) system integration for etch depth control process in 300mm Fab

Abstract

Most commonly used feed forward and feedback threaded control algorithms are not always sufficed to achieve the expected process control results. New smaller node sizes and complex process control requirements demand for new and embedded solutions. This paper discusses an advanced integration approach where a complete automation solution was designed and implemented by integrating Real Time Dispatching (RTD) and Advanced Process Control (APC) systems, delivering to complex custom process control requirements for a critical Deep Trench (DT) Poly Stud Recess Etch.