Miniaturized LIGA Fourier transformation spectrometer

Abstract

We have developed a miniaturized Fourier Transformation Spectrometer (FTS). The spectrometer is designed for application in the near infrared spectrum and can be used for the qualitative and quantitative analysis of liquid, solid or gaseous substances. Our FTS is basically a Michelson Interferometer that consists of an optical bench for the passive alignment of the optical components with an integrated electromechanical actuator. All parts such as the collimation optics, the detectors and the actuator are assembled on a chip. The system was manufactured using the LIGA technology.