Concepedia

Highly uniform and structures grown in a multiwafer vertical rotating susceptor MOVPE reactor

Xinrong Zhang, Ingrid Moerman, Christa Sys, Piet Demeester, J. A. Crawley, E. J. Thrush

Journal of Crystal Growth · 1997 · 15 citations · 1 references

DOI

Concepts

References

1

Single wafer processing in stagnation point flow CVD reactor: Prospects, constraints and reactor design

Prasad N. Gadgil · Journal of Electronic Materials · 1993 · 30 citations

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