Generation of Large‐Area Highly‐Nonequlibrium Plasma in Pure Hydrogen at Atmospheric Pressure

Abstract

Abstract Diffuse Coplanar Surface Barrier Discharge (DCSBD) is a novel type of atmospheric‐pressure plasma source developed for high‐speed large‐area surface plasma treatments. Basic characteristics of DCSBD operated in pure atmospheric‐pressure hydrogen were measured using optical and emission spectroscopy methods, and its potential for the surface treatment application was demonstrated by hydrogen plasma reduction of Cu 2 O thin layers. The discharge generates a thin layer of diffuse non‐equilibrium plasma with a high power density of 70 Wcm –3 . The mean electron density and electron temperature derived from spectroscopic data were 1.3 x 10 16 cm –3 and 19 x 10 3 K, and the surface Cu 2 O layers forming a weak boundary were reduced to metallic copper within several seconds. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)