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Recent advances in designing and fabrication of planar micro-supercapacitors for on-chip energy storage

Materials ScienceElectrical EngineeringSupercapacitorsEnergy HarvestingEngineeringHybrid CapacitorMicrofabricationEnergy ConversionPlanar Micro-supercapacitorsEnergy StorageSupercapacitorEnergy Storage DeviceOn-chip Energy StorageEnergy Storage SystemMicroelectronicsElectrochemical Double Layer CapacitorRecent Advances