Concepedia

Publication | Open Access

Mechanical Properties of Different Polysilicons

DOIFull Paper Access

10

Citations

0

References

2000

Year

W. N. Sharpe, Kamili M. Jackson, George Coles, David A. LaVan
Micro-Electro-Mechanical Systems (MEMS)

Abstract

Abstract Polysilicon materials from three different suppliers were tested in tension to determine their Young’s modulus and strength. The modulus of polysilicon from Cronos was 158 ± 8 GPa and its strength 1.56 ± 0.25 GPa, and the material from Sandia National Laboratories showed 157 ± 6.5 GPa and 3.09 ± 0.18 GPa. Two polysilicons from Standard MEMS Inc. showed 164 ± 11.2 GPa and 152 ± 10.0 GPa for modulus values and 2.08 ± 0.35 GPa and 2.00 ± 0.25 GPa for strengths. Polysilicon is therefore similar to most structural materials in that its modulus is essentially constant, but its strength can depend on processing.