Overview of LIGA Microfabrication

Abstract

This paper is an overview of the LIGA technique, an increasingly accepted approach for fabricating metal, ceramic or plastic microdevices. The LIGA technique was invented in Germany in the early 1980s and the acronym derives from the words LIthographie, Galvanoformung, Abformung meaning Lithography, Electroplating, and Molding in English. The paper is presented as an abbreviated set of annotated overheads used for the conference presentation and some summary remarks.