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Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture

DOI

28

Citations

13

References

1999

Year

P. Temple‐Boyer, Bekkay Hajji, J. L. Alay, J.R. Morante, A. Martínez
Sensors and Actuators A Physical

References

YearCitations

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