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A CPU on a glass substrate using CG-silicon TFTs
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2003
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Unknown Venue
System On ChipEngineeringMicrofabricationApplied PhysicsComputer ArchitectureComputer EngineeringGlass SubstrateContinuous-gain Silicon TftsSemiconductor Device FabricationInstrumentationMicroelectronicsProcess Temperature
A CPU is produced on a glass substrate using continuous-gain silicon TFTs. Corning 1737 glass with a distortion point of 640/spl deg/C forms the glass substrate and the process temperature never exceeds 550/spl deg/C. The 8b CPU contains 13,000 TFTs and the chip area is 13/spl times/13mm/sup 2/. Operation at a frequency of 3MHz was confirmed at 5V.