Novel high resolution optical scanner actuated by aerosol deposited PZT films

Abstract

A performance of a new type of optical 1-D scanner with high resolution for a raster scanning laser display was investigated. PZT actuators were integrated on the scanning device for the mirror driving by using aerosol deposition method. We realized the high resonant frequency of 33.4 kHz and the large scan angle (peak to peak value) of more than 25 degree. This result means that the scanner is capable to the application of SVGA (800/spl times/600) high-resolution-display or more.