Improved Performance of Integrated Solenoid Fluxgate Sensor Chip Using a Bilayer Co-Based Ribbon Core

Abstract

In this paper, based on the multiwire core design and microelectromechanical system technology, we report improved performance of a microsolenoid fluxgate sensor by integrating a bilayer core of co-based amorphous ribbon. By means of utilizing integrated multilayer core structure and high permeability amorphous ribbon core material, this paper shows how a high-performance microfluxgate chip with small dimensions can be realized. The fabricated sensors exhibit a best sensitivity of 3165 V/T, a power of 183.2 mW and a linear range of 150 μT at 100 kHz. The noise power density is found to be 0.5 nT/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> 1 Hz and the noise rms level is 2 nT in the frequency range of 25 mHz-10 Hz.