Publication | Closed Access
Beam-solid interactions for materials synthesis and characterization
50
Citations
0
References
1995
Year
EngineeringLaser ApplicationsChemistryMaterial SystemIon ProcessIon ImplantationIon BeamIon Beam ProcessingIon EmissionMaterials ScienceMaterials EngineeringMaterial PropertyIon-beam ModificationLogical WayMicrofabricationMaterials CharacterizationApplied PhysicsBeam-solid InteractionsMaterial Preparation
This volume has been arranged in a logical way by topic. The papers were divided into the following topical groups: (1) ion beam processing; (2) defects and diffusion; (3) ion-beam modification of polymers; (4) analysis and characterization; (5) sputtering; (6) laser-assisted and induced processes. Separate abstracts were prepared for most papers in this volume.