OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1995 · 50 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingPolymer ChemistrySurface ScienceIon ImplantationLaser Material ProcessingLaser Surface ProcessingBeam Interactions With MatterBeam-plasma InteractionFocused Ion Beam LithographyFocused Ion Beam PatterningIon Beam EtchingIon Beam ModificationIon Beam Surface TreatmentLaser - Material Interaction
This volume has been arranged in a logical way by topic. The papers were divided into the following topical groups: (1) ion beam processing; (2) defects and diffusion; (3) ion-beam modification of polymers; (4) analysis and characterization; (5) sputtering; (6) laser-assisted and induced processes. Separate abstracts were prepared for most papers in this volume.