Silicon-based three-dimensional microstructures for radiation dosimetry in hadrontherapy

Abstract

In this work, we propose a solid-state-detector for use in radiation microdosimetry. This device improves the performance of existing dosimeters using customized 3D-cylindrical microstructures etched inside silicon. The microdosimeter consists of an array of micro-sensors that have 3D-cylindrical electrodes of 15 μm diameter and a depth of 5 μm within a silicon membrane, resulting in a well-defined micrometric radiation sensitive volume. These microdetectors have been characterized using an 241Am source to assess their performance as radiation detectors in a high-LET environment. This letter demonstrates the capability of this microdetector to be used to measure dose and LET in hadrontherapy centers for treatment plan verification as part of their patient-specific quality control program.