A 0.8ma 50Hz 15b SNDR ΔΣ closed-loop 10g accelerometer using an 8/sup th/-order digital compensator

Abstract

A /spl Sigma//spl Delta/-based closed-loop /spl plusmn/10g accelerometer providing 88 dB SNDR over a 50 Hz bandwidth is fabricated in a 19.4 mm/sup 2/ die using 0.35 /spl mu/m CMOS technology. A /spl Delta//spl Sigma/ interface performs the readout, ADC and electrostatic actuation of the sensor, while an 8/sup th/-order digital compensator computes the actuation command.