Journal of The Electrochemical Society · 1988 · 33 citations · 0 references
Natural SciencesChemistryMaterials ScienceMaterials ChemistryPhysical ChemistryThin FilmsChemical Vapor DepositionSurface Chemistry Of SolidsSurface PhysicsThin-film DepositionThin-film MaterialsDeposition KineticsDeposition TechniquesFilm DepositionFilm Growth MechanismsPrecursor ChemistryThin Film Deposition MaterialsThin-film Growth Mechanisms