Strain-Induced Modulation of Electron Mobility in Single-Layer Transition Metal Dichalcogenides MX<sub>2</sub> (&lt;inline-formula&gt; &lt;tex-math notation="LaTeX"&gt;$M = {\rm Mo}$ &lt;/tex-math&gt; &lt;/inline-formula&gt;, W; &lt;inline-formula&gt; &lt;tex-math notation="LaTeX"&gt;$X = {\rm S}$ &lt;/tex-math&gt; &lt;/inline-formula&gt;, Se)

Manouchehr Hosseini, Mohammad Elahi, Mahdi Pourfath, David Esseni

IEEE Transactions on Electron Devices · 2015 · 102 citations · 35 references

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Abstract

In this paper, the effect of biaxial strain on the mobility of single-layer transition metal dichalcogenides (MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , MoSe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , WS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> , and WSe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) is investigated by accounting for the scattering from intrinsic phonon modes, remote phonons, and charged impurities. Ab initio simulations are employed to study a strain-induced effect on the electronic band structure, and the linearized Boltzmann transport equation is used to evaluate the low-field mobility. The results indicate that tensile strain increases the mobility. In particular, a significant increase in the mobility of single-layer MoSe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> and WSe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> with a relatively small tensile strain is observed. Under a compressive strain, however, the mobility exhibits a nonmonotonic behavior. With a relatively small compressive strain, the mobility decreases and then it partially recovers with a further increase in the compressive strain.

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