15-μm 128×128 GaAs/Al/sub x/Ga/sub 1-x/As quantum well infrared photodetector focal plane array camera

Abstract

In this paper, we discuss the development of very sensitive, very long wavelength infrared GaAs/Al/sub x/Ga/sub 1-x/As quantum well infrared photodetectors (QWIPs) based on bound-to-quasi-bound intersubband transition, fabrication of random reflectors for efficient light coupling, and the demonstration of a 15-/spl mu/m cutoff 128/spl times/128 focal plane array imaging camera. Excellent imagery, with a noise equivalent differential temperature (NE/spl Delta/T) of 30 mK has been achieved.