Transmission line pulse (TLP) testing of radio frequency (RF) micro-machined micro-electromechanical systems (MEMS) switches

Abstract

Radio frequency micro-electromechanical (RF-MEM) switches, both ohmic and capacitive, are important for future RF wired and wireless communication systems. In this paper, transmission line pulse testing and ESD characterization is shown for the first time. A new TLP methodology, an extension to classical TLP plot analysis, is presented and it is demonstrated as this new technique is necessary to correctly investigate the TLP response of RF-MEMS switches.