Publication | Closed Access
Proton implanted waveguides in LiNbO<sub>3</sub>, KNbO<sub>3</sub>and BaTiO<sub>3</sub>
53
Citations
7
References
1992
Year
EngineeringProton ImplantationPhysicsIon Concentration ProfilesApplied PhysicsAtomic PhysicsGuided-wave OpticPlanar WaveguidesOptoelectronicsPlanar Waveguide SensorAccelerator TechnologyBeam Optic
Abstract By using a Van De Graaf accelerator, planar waveguides in LiNbO3, KNbO3, and BaTiO3 are fabricated (at 300 K) by thermally controlled proton implantation. The waveguide properties are investigated by dark line mode spectroscopy. The reconstructed profiles closely follow the ion concentration profiles as determined by simulation (TRIM).
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