Publication | Closed Access

Tuning of the microstructure, mechanical and tribological properties of a-C:H films by bias voltage of high frequency unipolar pulse

Materials ScienceMaterials EngineeringEngineeringMicrofabricationMechanical EngineeringApplied PhysicsTribological PropertiesH FilmsBias VoltageVacuum DeviceMicroelectronicsThin Film Processing