Modelling ion-assisted deposition of CeO2 films

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

Engineering, Physics, Natural Sciences +11

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Engineering, Transmission Sputtering, Target Fabrication +21

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 909 citations

Computational Science, Engineering, Physics +5

Columnar microstructure in vapor-deposited thin films

A.G. Dirks, H. J. Leamy · Thin Solid Films · 1977 · 756 citations

Materials Science, Engineering, Microfabrication +5

Metallurgical Thermochemistry.

A. V. Bradshaw · Chemical Engineering Science · 1968 · 548 citations