Applied Physics Letters · 1999 · 113 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsElectronic MaterialsThin FilmsElectrical Properties Of CeramicsFerroelectric CeramicsFerroelectric MaterialsPiezoelectric MaterialsThin Film Electrical PropertiesThin-film MaterialsFatigue MechanismsFerroelectric PropertiesFerroelectric Thin FilmsFocused Ion Beam MachiningPiezoelectric PropertiesPiezoelectric Thin FilmsThin Film FerroelectricsThin-film Piezoelectrics
Scaling of the ferroelectric and piezoelectric properties in Pt/SrBi2Ta2O9/Pt thin films was studied. Focused ion beam milling was used to fabricate submicron devices (1×1, 0.5×0.5, 0.25×0.25, 0.09×0.09, and 0.07×0.07 μm2) and scanning force microscopy was used to examine their piezoelectric response. It was found that capacitors as small as 0.09×0.09 μm2 exhibit good piezoelectric/ferroelectric properties and that submicron (0.25×0.25 μm2) capacitors show resistance to bipolar fatigue with up to at least 109 cycles. The results were compared with similar capacitor structures milled in the Pb1.0(Nb0.04Zr0.28Ti0.68)O3 system where structures as small as 0.07×0.07 μm2 were analyzed.
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Fatigue-free ferroelectric capacitors with platinum electrodes
C. A-Paz de Araujo, J. D. Cuchiaro, L. D. McMillan et al. · Nature · 1995 · 2.6K citations
Natural Sciences, Materials Engineering, Materials Science +14
Piezoelectric measurements with atomic force microscopy
J. A. Christman, R. R. Woolcott, A. I. Kingon et al. · Applied Physics Letters · 1998 · 284 citations