Influence of bonded area ratio on the strength of FAB seals between silicon microstructures and glass - Concepedia

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Influence of bonded area ratio on the strength of FAB seals between silicon microstructures and glass

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References

1988

Year

Sten Johansson, K. Gustafsson, J-Å Schweitz

Sensors and Materials

Materials ScienceMaterials EngineeringEngineeringBonded Area RatioMicrofabricationSilicon MicrostructuresMechanical EngineeringSealantFab SealsMicrostructure

Abstract

Influence of bonded area ratio on the strength of FAB seals between silicon microstructures and glass