Detection of subsurface microflaws using the high-frequency acoustic microscopy method

Abstract

The possibility of detecting subsurface flaws in solids using the scanning high-frequency acoustic-microscopy method was investigated. The influence of a distortion of the focal region and aberrations, which appear during focusing to a subsurface region in a solid, on the formation of the output signal of a microscope is estimated via mathematical simulation of the refraction of focused acoustic beams in a solid and during experiments on a laboratory scanning acoustic microscope at a 400-MHz frequency of probing acoustic waves.