Nanolithography Publications

Publications in Nanolithography

Explore the most influential research papers and scholarly works that have shaped Nanolithography. Use the concept filter below to focus on a specific sub-area of research.

Nanolithography

4.3K

Publications

260.2K

Citations

Showing yearly statistics from 2000-2026.

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	Year	Citations
SOFT LITHOGRAPHY Younan Xia, George M. Whitesides Annual Review of Materials Science EngineeringBiomimetic MaterialsBiomedical EngineeringMicromachinesMaterials Fabrication	1998	4.6K
Imprint of sub-25 nm vias and trenches in polymers Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom Applied Physics Letters EngineeringPorous PolymerPolymersLithography ProcessBeam Lithography	1995	2.7K
Nanosphere Lithography: A Versatile Nanofabrication Tool for Studies of Size-Dependent Nanoparticle Optics Christy L. Haynes, Richard P. Van Duyne The Journal of Physical Chemistry B NanoparticlesEngineeringNano-opticsMetal NanoparticlesMicroscopy	2001	2.5K
Soft lithography for micro- and nanoscale patterning Dong Qin, Younan Xia, George M. Whitesides Nature Protocols Materials ScienceEngineeringBeam LithographyFlexible ElectronicsMicrofabrication	2010	2.3K
Imprint Lithography with 25-Nanometer Resolution Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom Science EngineeringElectron-beam LithographyMicroscopyNanodevicesPattern Transfer	1996	2.2K
Self‐Assembly in Natural and Unnatural Systems Douglas Philp, J. Fraser Stoddart Angewandte Chemie International Edition in English EngineeringBottom-up SynthesisNanodevicesMolecular Self-assemblyChemistry	1996	2.1K
Block Copolymer Lithography: Periodic Arrays of ~10 <sup>11</sup> Holes in 1 Square Centimeter Miri Park, Christopher Harrison, P. M. Chaikin, Science Spontaneous Self-assemblyEngineeringElectron-beam LithographyNanodevicesPattern Transfer	1997	1.8K
Nanoimprint Lithography: Methods and Material Requirements L. Jay Guo Advanced Materials EngineeringNanostructured PolymerAbstract Nanoimprint LithographyPolymer NanocompositesBeam Lithography	2007	1.8K
Nanoimprint lithography Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Uniformity AreaEngineeringElectron-beam LithographyNanodevicesOptoelectronic Devices	1996	1.7K
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates Sang Ouk Kim, Harun H. Solak, Mark P. Stoykovich, Nature Materials ScienceBlock Co-polymersEngineeringBeam LithographyNanomaterials	2003	1.6K
Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching Amit Kumar, George M. Whitesides Applied Physics Letters Materials ScienceChemical EtchingRubber StampEngineeringMicrofabrication	1993	1.6K
Enabling nanotechnology with self assembled block copolymer patterns Cheolmin Park, Jongseung Yoon, Edwin L. Thomas Polymer EngineeringNanostructured PolymerBcp Microdomain StructuresNanoscale ChemistryBlock Copolymers	2003	1.5K

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