Micropositioning Publications

Publications in Micropositioning

Explore the most influential research papers and scholarly works that have shaped Micropositioning. Use the concept filter below to focus on a specific sub-area of research.

Micropositioning

2.6K

Publications

107.7K

Citations

Showing yearly statistics from 2000-2026.

Page 1

	Year	Citations
A Survey of Control Issues in Nanopositioning Santosh Devasia, Evangelos Eleftheriou, S. O. Reza Moheimani IEEE Transactions on Control Systems Technology High ResolutionEngineeringNanocomputingNanometrologyMaterials Science	2007	1K
A robust MIMO terminal sliding mode control scheme for rigid robotic manipulators Zhihong Man, Andrew P. Papliński, Hong Ren Wu IEEE Transactions on Automatic Control Robot KinematicsRobotic SystemsRigid Robotic ManipulatorsEngineeringRobust Control	1994	958
Position Sensorless Permanent Magnet Synchronous Machine Drives—A Review Gaolin Wang, M.I. Valla, Jorge A. Solsona IEEE Transactions on Industrial Electronics MagnetismElectric MachineEngineeringMotor DriveSensorless Control Implementation	2019	736
Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application D. Croft, G. Shed, Santosh Devasia Journal of Dynamic Systems Measurement and Control EngineeringMicroscopyMechanical EngineeringHigh-speed Positioning ApplicationsMicroactuator	1999	713
Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey Guoying Gu, Li Zhu, Chun‐Yi Su, IEEE Transactions on Automation Science and Engineering EngineeringMechanical EngineeringPiezo-actuated StagesMicroactuatorSoft Robotics	2014	601
Inverse control of systems with hysteresis and creep Klaus Kuhnen IEE Proceedings - Control Theory and Applications Nonlinear ControlElectrical EngineeringEngineeringVibrationsMechanical Control	2001	506
Piezoelectric Actuators and Motors: Materials, Designs, and Applications Xiangyu Gao, Jikun Yang, Jingen Wu, Advanced Materials Technologies Materials ScienceElectrical EngineeringEngineeringFlexible ElectronicsMechanical Design	2019	495
Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues Yuen Kuan Yong, S. O. Reza Moheimani, Brian J. Kenton, Review of Scientific Instruments EngineeringMicroscopyStiff Piezoelectric ActuatorsMechanical EngineeringHigh-speed Flexure-guided Nanopositioning	2012	448
An Analytical Generalized Prandtl–Ishlinskii Model Inversion for Hysteresis Compensation in Micropositioning Control Mohammad Al Janaideh, Subhash Rakheja, Chun‐Yi Su IEEE/ASME Transactions on Mechatronics EngineeringMechanical EngineeringMicropositioning ControlSaturated HysteresisMicroactuator	2010	420
Development of flexible microactuator and its applications to robotic mechanisms Koichi Suzumori, S. Iikura, Hirohisa Tanaka Robotic SystemsEngineeringMechanical EngineeringChemical ActuatorMicroactuator	2002	402
Position Control in Lithographic Equipment [Applications of Control] Hans Butler IEEE Control Systems Feedforward ControlPositioning Accuracy RequirementsEngineeringAerospace EngineeringMechatronics	2011	397
Light‐Driven Titanium‐Dioxide‐Based Reversible Microfireworks and Micromotor/Micropump Systems Yiying Hong, Misael Diaz, Ubaldo M. Córdova‐Figueroa, Advanced Functional Materials EngineeringInorganic PhotochemistryMechanical EngineeringTio 2Uv‐induced Tio 2	2010	375

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