Micromanufacturing Publications

Publications in Micromanufacturing

Explore the most influential research papers and scholarly works that have shaped Micromanufacturing. Use the concept filter below to focus on a specific sub-area of research.

Micromanufacturing

824

Publications

36.6K

Citations

Showing yearly statistics from 2000-2026.

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	Year	Citations
Manufacturing engineering and technology Choice Reviews Online EngineeringIndustrial EngineeringMechanical EngineeringIndustrial Process EngineeringMicromanufacturing	1990	1.6K
A microfabricated atomic clock Svenja Knappe, Vishal Shah, Peter Schwindt, Applied Physics Letters EngineeringMechanical EngineeringFabrication TechniquesMicroelectromechanical SystemsMicromanufacturing	2004	670
Microscopic uniformity in plasma etching Richard A. Gottscho, C. W. Jurgensen, D. J. Vitkavage Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyMicromanufacturingIntegrated CircuitsPlasma Processing	1992	602
Soft lithographic methods for nano-fabrication Xiaomei Zhao, Younan Xia, George M. Whitesides Journal of Materials Chemistry EngineeringMicromanufacturingBiomedical EngineeringSoft Lithographic MethodsBeam Lithography	1997	429
The Mechanics of Machining at the Microscale: Assessment of the Current State of the Science Xinyu Liu, Richard E. DeVor, Shiv G. Kapoor, Journal of Manufacturing Science and Engineering EngineeringMultiscale MechanicsMicromechanicsMechanical EngineeringMicromanufacturing	2004	422
Micropumps—past, progress and future prospects Peter Woias Sensors and Actuators B Chemical Future ProspectsEngineeringMicromachinesMicrofabricationNanomanufacturing	2005	407
Comparing Microfluidic Performance of Three-Dimensional (3D) Printing Platforms Niall P. Macdonald, Joan M. Cabot, Petr Šmejkal, Analytical Chemistry EngineeringBiofabricationCell CultureMicromanufacturingBiomedical Engineering	2017	402
Let there be chip—towards rapid prototyping of microfluidic devices: one-step manufacturing processes Ansgar Waldbaur, Holger Rapp, Kerstin Länge, Analytical Methods EngineeringBiomimetic MaterialsBiofabricationOrgan-on-a-chipMicromanufacturing	2011	374
Micropumps—past, progress and future prospects Peter Woias Sensors and Actuators B Chemical Future ProspectsEngineeringMicromachinesMicrofabricationNanomanufacturing	2004	372
Wafer level packaging of MEMS Masayoshi Esashi Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringMicroelectromechanical SystemsSurface MicromachiningMicromanufacturing	2008	352
MicroLED technologies and applications: characteristics, fabrication, progress, and challenges Zhen Chen, Shuke Yan, Cameron Danesh Journal of Physics D Applied Physics EngineeringMicromanufacturingMicro Light-emitting DiodeMicro-optical ComponentMicromachines	2020	298
Integrated movable micromechanical structures for sensors and actuators L.-S. Fan, R.S. Muller IEEE Transactions on Electron Devices Movable Micromechanical StructuresEngineeringMechanical EngineeringMicroelectromechanical SystemsMicromanufacturing	1988	295

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