Concepedia

Frequency Trimming

Frequency Trimming is a post-fabrication adjustment method used in MEMS resonators to precisely align the resonant frequency of a device to a target value by selectively modifying its physical or electrical properties to compensate for manufacturing deviations.

45

Publications

1.2K

Citations

137

Authors

40

Institutions

Publications per year

2017–2026

16

Parents

Publications

45

Silicon photonics manufacturing

William A. Zortman, Douglas C. Trotter, Michael R. Watts · Optics Express · 2010 · 189 citations · Full text

, , +17

Accurate post-fabrication trimming of ultra-compact resonators on silicon

Amir H. Atabaki, Ali A. Eftekhar, Murtaza Askari et al. · Optics Express · 2013 · 62 citations · Full text

, , +16

Frequency trimming and Q-factor enhancement of micromechanical resonators via localized filament annealing

Kun Wang, Ark-Chew Wong, Wan-Thai Hsu et al. · 2002 · 59 citations

, , +17

Trimming of high-Q-factor silicon ring resonators by electron beam bleaching

Stefan Prorok, Alexander Yu. Petrov, Manfred Eich et al. · Optics Letters · 2012 · 52 citations

, , +17

Frequency Trimming for MEMS Resonator Oscillators

Wan-Thai Hsu, Andrew. R. Brown · Proceedings of the IEEE International Frequency Control Symposium · 2007 · 50 citations

, , +16

1–5 of 45

Authors

137

  1. FA
    Farrokh Ayazi

    Georgia Institute of Technology, United States

    4 publications · 88 citations

    4

    h-index

  2. TT
    Takashiro Tsukamoto

    Tohoku University, Japan

    3 publications · 67 citations

    3

    h-index

  3. XW
    Xuezhong Wu

    National University of Defense Technology, China

    3 publications · 63 citations

    3

    h-index

  4. TP
    T.E. Parker

    National Institute of Standards and Technology, United States

    3 publications · 64 citations

    3

    h-index

  5. DX
    Dingbang Xiao

    National University of Defense Technology, China

    3 publications · 63 citations

    3

    h-index

1–5 of 137

Institutions

40

  1. Georgia Institute of Technology

    Atlanta, United States

    5 h-index

    13 publications

    400 citations

  2. Georgi Nadjakov Institute of Solid State Physics

    Sofia, Bulgaria

    3 h-index

    3 publications

    52 citations

  3. Tohoku University

    Sendai, Japan

    3 h-index

    9 publications

    201 citations

  4. RTX (United States)

    Arlington, United States

    3 h-index

    5 publications

    101 citations

  5. National University of Defense Technology

    Changsha, China

    3 h-index

    20 publications

    410 citations

  6. Tsinghua University

    Beijing, China

    2 h-index

    4 publications

    48 citations

  7. University of Michigan

    Ann Arbor, United States

    2 h-index

    8 publications

    404 citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    2 h-index

    3 publications

    209 citations

1–8 of 40

Venues

  1. 3

    h-index

  2. International Journal of Mechanical Sciences

    2 publications · 67 citations

    3

    h-index

  3. Applied Physics Letters

    2 publications · 62 citations

    2

    h-index

  4. Optics Express

    2 publications · 251 citations

    2

    h-index

  5. Journal of Microelectromechanical Systems

    2 publications · 59 citations

    2

    h-index

1–5