Cleaning-induced Surface Damage

Cleaning-Induced Surface Damage is a mechanical degradation phenomenon belonging to the category of surface integrity alterations, specifically characterized by irreversible physical or microstructural modifications to a material’s surface layer resulting directly from the application of mechanical cleaning processes.

79

Publications

4K

Citations

359

Authors

146

Institutions

Publications per year

2017–2026

20

Authors

359

  1. RZ
    Rédouane Zitoune

    Institut Clément Ader, France

    3 publications · 75 citations

    3

    h-index

  2. MS
    Mehdi Salem

    Institut Clément Ader, France

    3 publications · 75 citations

    3

    h-index

  3. CW
    Chunming Wang

    Huazhong University of Science and Technology, China

    2 publications · 43 citations

    2

    h-index

  4. AH
    A. Hor

    Xerox (Canada), Canada

    2 publications · 59 citations

    2

    h-index

  5. XS
    X. Sourd

    Université Toulouse III - Paul Sabatier, France

    2 publications · 59 citations

    2

    h-index

1–5 of 359

Venues

  1. Applied Surface Science

    7 publications · 148 citations

    7

    h-index

  2. Optics & Laser Technology

    4 publications · 171 citations

    4

    h-index

  3. Surface Science

    3 publications · 123 citations

    3

    h-index

  4. Journal of Nuclear Materials

    2 publications · 30 citations

    2

    h-index

  5. Materials Science in Semiconductor Processing

    2 publications · 33 citations

    2

    h-index

1–5