Concepedia
2
Publications
82
Citations
H-Index
2022
Active since
Affiliations
Engineering Software Research and Development (United States)(Current)
Subrahmanyasarma Chitta is an author at Engineering Software Research and Development (United States).
Publications per year
2022–2023
Advanced Optical Proximity Correction (OPC) Techniques in Computational Lithography: Addressing the Challenges of Pattern Fidelity and Edge Placement Error
Preethish Nanan Botlagunta, Subrahmanyasarma Chitta · Global Journal of Medical Case Reports · 2022 · 64 citations · Full text
Machine Learning Driven Metrology and Defect Detection in Extreme Ultraviolet (EUV) Lithography: A Paradigm Shift in Semiconductor Manufacturing
Botlagunta Preethish Nanan, Subrahmanyasarma Chitta · 2023 · 18 citations · Full text
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