Concepedia

Sangwoo Yi

SY

Statistics

Publications

3

Citations

58

H-Index

3

Active since

1998

Affiliations

Seoul National University(Current)

Sangwoo Yi is an author at Seoul National University specializing in microelectromechanical systems, polysilicon, and materials science.

Publications per year

1998–2003

3

Publications

3

Mesa-supported, Single-crystal Microstructures Fabricated by the Surface/Bulk Micromachining Process

S. Park, Sangwoo Lee Sangwoo Lee, Sangwoo Yi · Japanese Journal of Applied Physics · 1999 · 25 citations

, , +17

The effects of post-deposition processes on polysilicon Young's modulus

Sangwoo Lee, Chang‐Ho Cho, Jongpal Kim et al. · Journal of Micromechanics and Microengineering · 1998 · 23 citations

, , +14

Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators

Sang‐Woo Lee, Sangjun Park, Sangwoo Yi et al. · 2003 · 10 citations

, , +16

1–3 of 3