Shrinivas Shetty - Concepedia

Author

Shrinivas Shetty

Also Known As

Shrinivas Shetty

Publications

Citations

H-Index

Concepts

All Affiliations

Shrinivas Shetty is an author at Texas Instruments (United States) specializing in instrumentation, microelectronics, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	38
2	Applied Physics	3	3	38
3	Computer Engineering	1	1	10
4	Industrial Engineering	1	1	10
5	Mechanical Engineering	1	1	15

Shrinivas Shetty

Publications

Citations

H-Index

Page 1

	Year	Citations
Impact of laser spike annealing dwell time on wafer stress and photolithography overlay errors Shrinivas Shetty, Amitabh Jain, David M. Owen, EngineeringElectron-beam LithographyMechanical EngineeringLaser SpikeWafer Stress	2009	15
Wafer Temperature Measurement and Control During Laser Spike Annealing Shaoyin Chen, Jeff Hebb, Amitabh Jain, EngineeringIntegrated CircuitsWafer Scale ProcessingCalibrationInstrumentation	2007	13
A study of feed-forward strategies for overlay control in lithography processes using CGS technology Doug Anberg, David M. Owen, Byoungho Lee, Cgs TechniqueEngineeringElectron-beam LithographyIndustrial EngineeringAdvanced Manufacturing	2015	10

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