Tetsuro Nakamura Tetsuro Nakamura

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Active since

1991

Affiliations

Toyohashi University of Technology(Current)

Tetsuro Nakamura Tetsuro Nakamura is an author at Toyohashi University of Technology specializing in semiconductor materials, materials science, and chemical vapor deposition.

Publications per year

1991–1995

Publications

Double SOI Structures and Device Applications with Heteroepitaxial Al2O3 and Si

Mákoto Ishida, Young‐Tae Lee, T. Higashino et al. · Japanese Journal of Applied Physics · 1995 · 24 citations

Engineering, Materials Engineering, Materials Science +17

Novel Pressure Sensors Using Epitaxially Stacked Si/Al2O3/Si Structures for High-Precision Thickness Control of Silicon Diaphragms

Gwiy-Sang Chung, Shoji Kawahito, Mákoto Ishida et al. · Japanese Journal of Applied Physics · 1991 · 10 citations

Engineering, Materials Engineering, Materials Science +17

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