Concepedia

Ta Hsun Yeh

TH

2

Publications

39

Citations

2

H-Index

1996

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

Ta Hsun Yeh is an author at National Yang Ming Chiao Tung University specializing in thin films, surface science, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsChemical EngineeringElectronic Materials

Publications per year

1996–1997

2

Publications

2

Influences of deposition temperature on thermal stability and moisture resistance of chemical vapor deposited fluorinated silicon oxide by using indirect fluorinating precursor

Kow Ming Chang, Shih Wei Wang, C.J. Wu et al. · Applied Physics Letters · 1996 · 22 citations

Engineering, Thin Film Process Technology, Vacuum Device +18

Leakage Performance and Breakdown Mechanism of Silicon‐Rich Oxide and Fluorinated Oxide Prepared by Electron Cyclotron Resonance Chemical Vapor Deposition

Kow Ming Chang, Shih Wei Wang, Ta Hsun Yeh et al. · Journal of The Electrochemical Society · 1997 · 17 citations

Materials Science, Pretunneling Leakage Performance, Dielectric Constant +13

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