Concepedia
Author
Lee-Chin Kuo
Also Known As
1
Publications
25
Citations
H-Index
0
Concepts
All Affiliations
×
All Concepts
Amorphous silicon and amorphous silicon nitride films prepared by a plasma-enhanced chemical vapor deposition process as optical coating materials
Rung‐Ywan Tsai, Lee-Chin Kuo, F. C. Ho
Applied Optics
1993
Page 1