Statistics
Publications
12
Citations
265
H-Index
12
Active since
1995
Affiliations
Applied Materials (United States)(Current)
Mehul Naik is an author at Applied Materials (United States) specializing in materials science, materials engineering, and electronic materials.
Publications per year
1995–2021
12
12
Cobalt fill for advanced interconnects
Nikolaos Bekiaris, Zhiyuan Wu, Ren He et al. · 2017 · 65 citations
CVD of copper using copper(I) and copper(II) β-diketonates
Mehul Naik, William N. Gill, R. H. Wentorf et al. · Thin Solid Films · 1995 · 47 citations
Natural Sciences, Materials Engineering, Materials Science +7
PVD- Treated ALD TaN for Cu Interconnect Extension to 5nm Node and Beyond
Zhiyuan Wu, Rui Li, Xiangjin Xie et al. · 2018 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +17
Interconnect Trend for Single Digit Nodes
Mehul Naik · 2018 · 20 citations
Integration Challenges for CMP of Copper
Rajeev Bajaj, Ajoy Zutshi, Rahul Surana et al. · MRS Bulletin · 2002 · 16 citations
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