Shun-Tang Lin

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Publications

Citations

133

H-Index

Active since

2003

Affiliations

National Taiwan University of Science and Technology(Current)

Shun-Tang Lin is an author at National Taiwan University of Science and Technology specializing in materials science, materials engineering, and thin films.

Publications per year

2003–2006

Publications

Diffusion barrier properties of sputtered TaNx between Cu and Si using TaN as the target

Yu‐Lin Kuo, Jui-Jen Huang, Shun-Tang Lin et al. · Materials Chemistry and Physics · 2003 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +14

Characteristics of sputtered TaBx thin films as diffusion barriers between copper and silicon

Shun-Tang Lin, Yu‐Lin Kuo, Chiapyng Lee · Applied Surface Science · 2003 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +14

Characteristics of sputtered Ta–B–N thin films as diffusion barriers between copper and silicon

Shun-Tang Lin, Chiapyng Lee · Applied Surface Science · 2006 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +12

Growth of Tantalum Boride Films by RF Magnetron Sputtering

Shun-Tang Lin, Chiapyng Lee · Journal of The Electrochemical Society · 2003 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of tantalum boron nitride films on Si by radio frequency reactive sputtering: effect of N2/Ar flow ratio

Shun-Tang Lin, Chiapyng Lee · Materials Chemistry and Physics · 2003 · 11 citations

Engineering, Materials Engineering, Materials Science +16

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