Yu‐Hao Kang

Organic Airborne Molecular Contamination in Semiconductor Fabrication Clean Rooms

Walter Den, Hsunling Bai, Yu‐Hao Kang · Journal of The Electrochemical Society · 2006 · 66 citations · Full text

Engineering, Air Quality, Amc Control Strategies +19

Vapor adsorption characteristics of toluene in an activated carbon adsorbent-loaded nonwoven fabric media for chemical filters applied to cleanrooms

Angus Shiue, Yu‐Hao Kang, Shih-Cheng Hu et al. · Building and Environment · 2010 · 51 citations

Chemical Engineering, Engineering, Decontamination +12

Validation and application of adsorption breakthrough models for the chemical filters used in the make-up air unit (MAU) of a cleanroom

Angus Shiue, Walter Den, Yu‐Hao Kang et al. · Building and Environment · 2010 · 42 citations

Filtration, Chemical Engineering, Air Sampling +13

Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption–gas chromatography–mass spectrometry

Yu‐Hao Kang, Walter Den, Hsunling Bai et al. · Journal of Chromatography A · 2005 · 35 citations

Chemical Engineering, Environmental Chemistry, Engineering +10

Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom

Yu‐Hao Kang, Angus Shiue, Shih-Cheng Hu et al. · Building and Environment · 2009 · 29 citations

Chemical Engineering, Environmental Chemistry, Engineering +12