Concepedia
Statistics
Publications
1
Citations
35
H-Index
Active since
2006
Stella Chang is an author specializing in thin films, microelectronics, and electrical engineering.
Top concepts
Thin FilmsEngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationElectronic DevicesElectronic MaterialsElectronic PackagingMaterials Engineering
Publications per year
2006–2006
Development of a low temperature MEMS process with a PECVD amorphous silicon structural layer
Stella Chang, Siva Sivoththaman · Journal of Micromechanics and Microengineering · 2006 · 35 citations
Mems Devices, Engineering, Microelectromechanical Systems +19
1–1 of 1