Concepedia

Q. X. Zhang

QX

2

Publications

62

Citations

2

H-Index

2004

Active since

Affiliations

Singapore Science Park(Current)

Nanyang Technological University

Institute of Microelectronics

Q. X. Zhang is an author at Singapore Science Park specializing in microfabrication, engineering, and electrical engineering.

Top concepts

Publications per year

2004–2005

2

Publications

2

Improvement of isolation for MEMS capacitive switch via membrane planarization

Aibing Yu, A. Q. Liu, Q. X. Zhang et al. · Sensors and Actuators A Physical · 2004 · 46 citations

, , +4

Micromachined DC contact capacitive switch on low-resistivity silicon substrate

Aibing Yu, A. Q. Liu, Q. X. Zhang et al. · Sensors and Actuators A Physical · 2005 · 16 citations

, , +6

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