R. W. Light - Concepedia

Author

R. W. Light

University of New Mexico

Also Known As

R Light, R W. Light, R. W. LIGHT, R. W. Light, R.W. Light, Ron W. Light

Publications

357

Citations

H-Index

Concepts

All Affiliations

University of New Mexico Sandia National Laboratories Los Alamos National Laboratory

About

R. W. Light is an author at University of New Mexico specializing in engineering, chemistry, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	10	12	295
2	Natural Sciences	6	6	146
3	Applied Physics	4	4	115
4	Biochemistry	4	4	126
5	Biomolecular Engineering	1	1	34

R. W. Light

Publications

306

Citations

H-Index

Page 1

	Year	Citations
A Kinetic Model for Plasma Etching Silicon in a SF6/O2 RF Discharge H. Anderson, Joanna Merson, R. W. Light IEEE Transactions on Plasma Science EngineeringElectron DistributionPlasma Etching SiliconPlasma ProcessingChemical Engineering	1986	73
Reactions of aminophosphines with carbon dioxide, carbonyl sulfide, and carbon disulfide. Crystal and molecular structure of a seven-coordinate tris(dithiocarbamato) complex of phosphorus(III) R. W. Light, Larry D. Hutchins, Robert T. Paine, Inorganic Chemistry Inorganic ChemistryCarbon DioxideEngineeringBiochemistryNatural Sciences	1980	45
Interaction of the dicoordinate phosphorus cation 1,3-dimethyl-1,3,2-diazaphospholidide with transition metal nucleophiles R. W. Light, Robert T. Paine Journal of the American Chemical Society Inorganic ChemistryTransition Metal NucleophilesEngineeringChemical AnalysisBiochemistry	1978	34
Synthesis, structure, and bonding of the bis(phosphenium) ion-dicobalt carbonyl complex Co2(CO)5(.mu.-PN(CH3)CH2CH2NCH3)2 Larry D. Hutchins, R. W. Light, Robert T. Paine Inorganic Chemistry Inorganic ChemistryChemical EngineeringEngineeringBiochemistryDonut Icon	1982	29
The synthesis and characterization of cyclopentadienylfluorophosphine ligands and their borane(3) complexes Robert T. Paine, R. W. Light, Diana Maier Inorganic Chemistry Inorganic ChemistryEngineeringHeterocyclicCyclopentadienylfluorophosphine LigandsCoordination Complex	1979	20
Reactive Ion Etching of Aluminum/Silicon in BBr3 / Cl2 and BCl3 / Cl2 Mixtures Henry Bell, H. Anderson, R. W. Light Journal of The Electrochemical Society EngineeringBoron TribromideReactive Ion EtchingPlasma ProcessingChemical Engineering	1988	19
REACTIONS OF SULFUR DIOXIDE WITH AMINOPHOSPHINES R. W. Light, Robert T. Paine Phosphorous and Sulfur and the Related Elements Inorganic ChemistryEngineeringHeterocyclicBiochemistryNatural Sciences	1980	18
Three micron CMOS technology for custom high reliability and radiation-hardened integrated circuits T. V. Nordstrom, R. W. Light, F.W. Sexton OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) EngineeringVlsi DesignMicron Cmos ProcessComputer ArchitectureIntegrated Circuits	1983	14
Profile Control of Polysilicon Lines with an SF 4 / O 2 Plasma Etch Process R. W. Light, Henry Bell Journal of The Electrochemical Society Plasma Etching ProcessElectrical EngineeringEngineeringElectron-beam LithographyBeam Lithography	1983	12
Reactive Ion Etching of Aluminum/Silicon R. W. Light Journal of The Electrochemical Society Materials ScienceMaterials EngineeringElectrical EngineeringReproducible Dry EtchingEngineering	1983	11

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