R. W. Light

A Kinetic Model for Plasma Etching Silicon in a SF6/O2 RF Discharge

H. Anderson, Joanna Merson, R. W. Light · IEEE Transactions on Plasma Science · 1986 · 73 citations

Engineering, Electron Distribution, Plasma Etching Silicon +21

Reactions of aminophosphines with carbon dioxide, carbonyl sulfide, and carbon disulfide. Crystal and molecular structure of a seven-coordinate tris(dithiocarbamato) complex of phosphorus(III)

R. W. Light, Larry D. Hutchins, Robert T. Paine et al. · Inorganic Chemistry · 1980 · 45 citations

Inorganic Chemistry, Carbon Dioxide, Engineering +10

Interaction of the dicoordinate phosphorus cation 1,3-dimethyl-1,3,2-diazaphospholidide with transition metal nucleophiles

R. W. Light, Robert T. Paine · Journal of the American Chemical Society · 1978 · 34 citations

Inorganic Chemistry, Transition Metal Nucleophiles, Engineering +15

Synthesis, structure, and bonding of the bis(phosphenium) ion-dicobalt carbonyl complex Co2(CO)5(.mu.-PN(CH3)CH2CH2NCH3)2

Larry D. Hutchins, R. W. Light, Robert T. Paine · Inorganic Chemistry · 1982 · 29 citations

Inorganic Chemistry, Chemical Engineering, Engineering +11

The synthesis and characterization of cyclopentadienylfluorophosphine ligands and their borane(3) complexes

Robert T. Paine, R. W. Light, Diana Maier · Inorganic Chemistry · 1979 · 20 citations

Inorganic Chemistry, Engineering, Heterocyclic +10