Manabu Ataka

Effect of the composition and thermal annealing on the transformation temperatures of sputtered TiNi shape memory alloy thin films

Patrick Surbled, C. Clerc, Bruno Le Pioufle et al. · Thin Solid Films · 2001 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +13

Ground state cooling of a quantum electromechanical system with a silicon nitride membrane in a 3D loop-gap cavity

Atsushi Noguchi, Rekishu Yamazaki, Manabu Ataka et al. · New Journal of Physics · 2016 · 48 citations · Full text

Natural Sciences, Electrical Engineering, Physics +15

SiO$_{2}$ Electret Generated by Potassium Ions on a Comb-Drive Actuator

Tatsuhiko Sugiyama, Mitsuru Aoyama, Y. Shibata et al. · Applied Physics Express · 2011 · 43 citations

Engineering, Materials Engineering, Materials Science +13

Design, Fabrication, and Operation of Two-Dimensional Conveyance System With Ciliary Actuator Arrays

Manabu Ataka, Bernard Legrand, L. Buchaillot et al. · IEEE/ASME Transactions on Mechatronics · 2009 · 36 citations

Engineering, Autonomous Systems, Mechanical Engineering +17

An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

Chikako Sano, Manabu Ataka, Gen Hashiguchi et al. · Micromachines · 2020 · 34 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +15