Concepedia

Jun-ichi Kageyama

JK

1

Publications

55

Citations

1

H-Index

1994

Active since

Affiliations

Tohoku University(Current)

Jun-ichi Kageyama is an author at Tohoku University specializing in ozone, chemical engineering, and engineering.

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Publications per year

1994–1994

1

Publications

1

Infrared spectroscopic study of initial stages of ultraviolet ozone oxidation of Si(100) and (111) surfaces

Michio Niwano, Jun-ichi Kageyama, Koji Kinashi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 55 citations

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