Jun-ichi Kageyama - Concepedia

Author

Jun-ichi Kageyama

Also Known As

Jun-ichi Kageyama

Publications

Citations

H-Index

Concepts

All Affiliations

Jun-ichi Kageyama is an author at Tohoku University specializing in ozone, chemical engineering, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	1	1	55
2	Health Sciences	1	1	55
3	Applied Physics	1	1	55
4	Chemical Engineering	1	1	55
5	Chemistry	1	1	55

Jun-ichi Kageyama

Publications

Citations

H-Index

Page 1

	Year	Citations
Infrared spectroscopic study of initial stages of ultraviolet ozone oxidation of Si(100) and (111) surfaces Michio Niwano, Jun-ichi Kageyama, Koji Kinashi, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Optical MaterialsEngineeringChemistryChemical EngineeringUltraviolet Ozone Oxidation	1994	55

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