Concepedia
1
Publications
54
Citations
H-Index
1992
Active since
Affiliations
Tohoku University(Current)
Yoshiyuki Igari is an author at Tohoku University specializing in applied physics, microelectronics, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronics
Publications per year
1992–1992
SiO production from Si(100) and (111) surfaces by reaction with O2 beams
Katsuyuki Ohkubo, Yoshiyuki Igari, Shinji Tomoda et al. · Surface Science · 1992 · 54 citations
Materials Science, Surface Characterization, Sio Production +9
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