Concepedia
Author
Hasna Faïk
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Publications
15
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Ultra shallow P+/N junctions using plasma immersion ion implantation and laser annealing for sub 0.1 μm CMOS devices
Frank Torregrosa, C. Laviron, F. Milési, +3
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
2005
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