Statistics
Publications
2
Citations
105
H-Index
2
Active since
2010
Affiliations
IBM Research - Almaden(Current)
Chi-Chun Liu is an author at IBM Research - Almaden specializing in microfabrication, engineering, and materials science.
Publications per year
2010–2016
2
2
Surface Roughening of Polystyrene and Poly(methyl methacrylate) in Ar/O2 Plasma Etching
Yuk‐Hong Ting, Chi-Chun Liu, Sangmin Park et al. · Polymers · 2010 · 84 citations · Full text
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
Hsinyu Tsai, Hiroyuki Miyazoe, Ankit Vora et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 21 citations
Finfet Device Fabrication, Engineering, Pattern Transfer +16
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