Chi-Chun Liu - Concepedia

Author

Chi-Chun Liu

Also Known As

Chi-Chun Liu

Publications

105

Citations

H-Index

Concepts

All Affiliations

Chi-Chun Liu is an author at IBM Research - Almaden specializing in microfabrication, engineering, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	105
2	Applied Physics	2	2	105
3	Materials Science	2	2	105
4	Microelectronics	1	1	21
5	3D Printing	1	1	21

Chi-Chun Liu

Publications

105

Citations

H-Index

Page 1

	Year	Citations
Surface Roughening of Polystyrene and Poly(methyl methacrylate) in Ar/O2 Plasma Etching Yuk‐Hong Ting, Chi-Chun Liu, Sangmin Park, Polymers EngineeringPlasma ProcessingMethyl MethacrylateNanolithography MethodPolymer Chemistry	2010	84
High chi block copolymer DSA to improve pattern quality for FinFET device fabrication Hsinyu Tsai, Hiroyuki Miyazoe, Ankit Vora, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Finfet Device FabricationEngineeringPattern TransferWafer Scale ProcessingBeam Lithography	2016	21

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