Concepedia

Author

K. KOGA

Tokyo Electron (Japan)

Also Known As

K Koga, K. KOGA, Kazuya Koga, Kazuya Koga Kazuya Koga

8

Publications

80

Citations

3

H-Index

14

Concepts

All Affiliations

Tokyo Electron (Japan)Kyoto UniversityTokyo Institute of TechnologyTakushoku University
KK

About

K. KOGA is an author at Tokyo Electron (Japan) specializing in engineering, electrical engineering, and computational electromagnetics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

3

3

80

2

Electrical Engineering

2

2

57

3

Antenna

2

2

44

4

Plasma Confinement

2

2

59

5

Plasma Diagnostics

2

2

59

K. KOGA

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3

Publications

80

Citations

3

H-Index

YearCitations

Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge

Y. Yasaka, Daiki Nozaki Daiki Nozaki, K. KOGA,

Japanese Journal of Applied Physics

1999

36

Production of large-diameter plasma using multi-slotted planar antenna

Y. Yasaka, D. Nozaki, K. KOGA,

Plasma Sources Science and Technology

1999

23

Planar microwave discharges with active control of plasma uniformity

Y. Yasaka, K. KOGA, Nobuo Ishii,

Physics of Plasmas

2002

21

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