Statistics
Publications
3
Citations
80
H-Index
3
Active since
1999
K. KOGA is an author at Tokyo Electron (Japan) specializing in microwave engineering, antennas, and physics.
Publications per year
1999–2002
3
3
Production of large-diameter plasma using multi-slotted planar antenna
Y. Yasaka, D. Nozaki, K. KOGA et al. · Plasma Sources Science and Technology · 1999 · 23 citations
Planar microwave discharges with active control of plasma uniformity
Y. Yasaka, K. KOGA, Nobuo Ishii et al. · Physics of Plasmas · 2002 · 21 citations · Full text
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