L. M. Shirey

Low-Loss, Extreme Subdiffraction Photon Confinement via Silicon Carbide Localized Surface Phonon Polariton Resonators

Joshua D. Caldwell, O. J. Glembocki, Yan Francescato et al. · Nano Letters · 2013 · 309 citations

Natural Sciences, Materials Engineering, Materials Science +17

Proximity X-ray Lithography Using Self-Assembled Alkylsiloxane Films:  Resolution and Pattern Transfer

Xiao Yang, Richard D. Peters, Tae Kyoung Kim et al. · Langmuir · 2000 · 65 citations

Engineering, Materials Engineering, Materials Science +17

Imaging layers for 50 kV electron beam lithography: Selective displacement of noncovalently bound amine ligands from a siloxane host film

Walter J. Dressick, Mingshu Chen, Susan L. Brandow et al. · Applied Physics Letters · 2001 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanolithography by displacement of catalytic metal clusters using an atomic force microscope tip

Susan L. Brandow, Walter J. Dressick, Charles S. Dulcey et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Photoresist channel-constrained deposition of electroless metallization on ligating self-assembled films

Jeffrey M. Calvert, Gary S. Calabrese, John F. Bohland et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 20 citations

Engineering, Electrical Engineering, Materials Science +17