Concepedia

Yoshio Machi

YM

Statistics

Publications

15

Citations

536

H-Index

12

Active since

1978

Affiliations

Tokyo Denki University(Current)

Yoshio Machi is an author at Tokyo Denki University specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringSurface ScienceChemical EngineeringMaterials EngineeringNanotechnologyOptoelectronicsPhysics

Publications per year

1978–2001

15

Publications

15

Deposition mechanism of hydrogenated hard-carbon films in a CH4 rf discharge plasma

Nobuki Mutsukura, Shinichi Inoue, Yoshio Machi · Journal of Applied Physics · 1992 · 170 citations · Full text

Engineering, Glow Discharge, Kinetic Energy +17

Plasma sheath thickness in radio-frequency discharges

Nobuki Mutsukura, Kenji Kobayashi, Yoshio Machi · Journal of Applied Physics · 1990 · 78 citations

Electrical Engineering, Predominant Ion, Engineering +15

Deposition of hard carbon films by rf glow discharge method

Kenji Kobayashi, Nobuki Mutsukura, Yoshio Machi · Journal of Applied Physics · 1986 · 45 citations

Materials Science, Diamond Grains, Electrical Engineering +13

Monitoring of radio-frequency glow-discharge plasma

Nobuki Mutsukura, Kenji Kobayashi, Yoshio Machi · Journal of Applied Physics · 1989 · 39 citations

Radio-frequency Glow-discharge Plasma, Electrical Engineering, Engineering +12

Analysis of diamond phase in hydrogenated hard carbon film using radio frequency plasma etching

Yoshihito Shimada, Nobuki Mutsukura, Yoshio Machi · Journal of Applied Physics · 1992 · 29 citations

Materials Science, Materials Engineering, Diamond-like Carbon +15

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