C.H. Liu - Concepedia

Author

C.H. Liu

Also Known As

C.H. Liu, Chan‐Yu Liu, Chieh-hung Liu

Publications

Citations

H-Index

Concepts

All Affiliations

C.H. Liu is an author at Industrial Technology Research Institute specializing in engineering, microfabrication, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	40
2	Applied Physics	1	1	25
3	Computer Engineering	1	1	15
4	Electrical Engineering	1	1	15
5	Industrial Engineering	1	1	15

C.H. Liu

Publications

Citations

H-Index

Page 1

	Year	Citations
SiOx plasma thin film deposition using a low-temperature cascade arc torch Andrew C. Ritts, C.H. Liu, Qingsong Yu Thin Solid Films Materials ScienceEngineeringMicrofabricationSurface ScienceApplied Physics	2011	25
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection Oliver D. Patterson, Deborah A. Ryan, Mike D. Monkowski, EngineeringSystematic Patterning ProblemsIndustrial EngineeringReliability EngineeringSystems Engineering	2013	15
Reducing the overkills and retests in wafer testing process Shih‐Cheng Horng, S.Y. Lin, M.-H. Cheng,	2003	10

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