Concepedia

C.H. Liu

CL

3

Publications

50

Citations

3

H-Index

2003

Active since

Affiliations

Industrial Technology Research Institute(Current)

C.H. Liu is an author at Industrial Technology Research Institute specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringThin FilmsApplied PhysicsInstrumentationSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationSoftware TestingDesign For Testing

Publications per year

2003–2013

3

Publications

3

SiOx plasma thin film deposition using a low-temperature cascade arc torch

Andrew C. Ritts, C.H. Liu, Qingsong Yu · Thin Solid Films · 2011 · 25 citations

Materials Science, Engineering, Microfabrication +6

Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection

Oliver D. Patterson, Deborah A. Ryan, Mike D. Monkowski et al. · 2013 · 15 citations

Engineering, Systematic Patterning Problems, Industrial Engineering +18

Reducing the overkills and retests in wafer testing process

Shih‐Cheng Horng, S.Y. Lin, M.-H. Cheng et al. · 2003 · 10 citations

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